Cymer CSD 6 EUV Tenant Improvement

Hensel PhelpsProjectsScience + TechnologyCymer CSD 6 EUV Tenant Improvement

About the Project

The $7 million, 15,400-SF Cymer CSD EUV Tenant Improvement (TI) project consisted of three Class 10K clean rooms, totaling 7,100 SF, for extreme ultraviolet (EUV) laser productions, and 8,300 SF of expansion office space to facilitate management and production of the EUV systems. The fast-tracked and aggressive schedule ensured that Cymer met their already existing manufacturing and delivery commitments concerning this new laser technology. Cymer is the world’s leading supplier of excimer light sources used in semiconductor manufacturing.

Quick Facts

  • Location San Diego, CA
  • Client Cymer, Inc.
  • Industry Science + Technology
  • Line of Business Construction
  • Completion Date February 2008
  • Duration 5 months
  • Contract Value $ 7,333,579
  • Square Footage 45,000 SF

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