Cymer CSD 6 EUV Tenant Improvement - Hensel Phelps

About the Project

Cymer is the world’s leading supplier of excimer light sources used in semiconductor manufacturing. This tenant improvement project consisted of three Class 10K clean rooms for extreme ultraviolet (EUV) laser productions and 8,300 SF of expansion office space to facilitate management and production of the EUV systems. The fast-tracked and aggressive schedule ensured that Cymer met their already existing manufacturing and delivery commitments concerning this new laser technology.

Quick Facts

Location San Diego, California
Client Cymer, Inc.
Architect AVRP Studios
Industry Science + Technology
Line of Business Construction
Delivery Method CM at Risk
Completion Date February 2008
Duration 6 months
Contract Value $ 7,333,579
Square Footage 45,000 SF

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